Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D352910 | Processing machine for electron beam lithography system | Takashi Yamamoto, Tomoyuki Miyata, Mitsuru Ohnuma, Toshihiko Wada, Takashi Yamazaki +1 more | 1994-11-29 |
| D352911 | Processing machine for electron beam lithography system | Takashi Yamamoto, Tomoyuki Miyata, Mitsuru Ohnuma, Toshihiko Wada, Seishiro Sato | 1994-11-29 |
| D349888 | Controller for semi-conductor processing machine | Takashi Yamamoto, Tomoyuki Miyata, Mitsuru Ohnuma, Toshihiko Wada, Seishiro Sato | 1994-08-23 |