Issued Patents 1994
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5358807 | Mask for manufacturing semiconductor device and method of manufacture thereof | — | 1994-10-25 |
| 5352550 | Mask for manufacturing semiconductor devices and method of manufacture thereof | — | 1994-10-04 |
| 5350649 | Mask for manufacturing semiconductor device and method of manufacture thereof | — | 1994-09-27 |
| 5311026 | Charged particle beam lithography system and method therefor | Norio Saitou, Takashi Yamazaki, Hideo Todokoro | 1994-05-10 |
| 5306585 | Mask for manufacturing semiconductor device and method of manufacture thereof | — | 1994-04-26 |
| 5298365 | Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process | Noboru Moriuchi | 1994-03-29 |