Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5311026 | Charged particle beam lithography system and method therefor | Norio Saitou, Yoshihiko Okamoto, Takashi Yamazaki | 1994-05-10 |
| 5283440 | Electron beam writing system used in a cell projection method | Yasunari Sohda, Norio Saitou, Haruo Yoda, Hiroyuki Itoh, Hiroyuki Shinada +2 more | 1994-02-01 |
| 5278408 | Instrument and method for 3-dimensional atomic arrangement observation | Hiroshi Kakibayashi, Yasuhiro Mitsui, Katsuhiro Kuroda | 1994-01-11 |
| 5276325 | Scanning microscope and a method of operating such a scanning microscope | Tadashi Otaka, Osamu Yamada | 1994-01-04 |