Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5283440 | Electron beam writing system used in a cell projection method | Yasunari Sohda, Hideo Todokoro, Norio Saitou, Hiroyuki Itoh, Hiroyuki Shinada +2 more | 1994-02-01 |
| 5281827 | Charged particle beam exposure apparatus | Masamichi Kawano, Masahide Okumura, Yukinobu Shibata, Tadao Konishi | 1994-01-25 |
| 5278421 | Pattern fabrication method using a charged particle beam and apparatus for realizing same | Fumio Murai | 1994-01-11 |