MO

Masahide Okumura

HI Hitachi: 1 patents #856 of 3,149Top 30%
HC Hitachi Instruments Engineering Co.: 1 patents #1 of 23Top 5%
Overall (1994): #94,989 of 165,921Top 60%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5281827 Charged particle beam exposure apparatus Masamichi Kawano, Haruo Yoda, Yukinobu Shibata, Tadao Konishi 1994-01-25