Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5311026 | Charged particle beam lithography system and method therefor | Yoshihiko Okamoto, Takashi Yamazaki, Hideo Todokoro | 1994-05-10 |
| 5283440 | Electron beam writing system used in a cell projection method | Yasunari Sohda, Hideo Todokoro, Haruo Yoda, Hiroyuki Itoh, Hiroyuki Shinada +2 more | 1994-02-01 |