Issued Patents 1994
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350485 | High-resolution lithography and semiconductor device manufacturing method | Hiroshi Shiraishi, Takashi Soga, Toshio Sakamizu, Nobuaki Hayashi | 1994-09-27 |
| 5334845 | Charged beam exposure method and apparatus as well as aperture stop and production method thereof | Hiroaki Wakabayashi, Yoshinori Nakayama, Shinji Okazaki | 1994-08-02 |
| 5324550 | Pattern forming method | Hidenori Yamaguchi, Norio Hasegawa, Toshio Sakamizu, Hiroshi Shiraishi | 1994-06-28 |
| 5318868 | Photomask and method for manufacturing semiconductor device using photomask | Norio Hasegawa | 1994-06-07 |
| 5317168 | Superconducting field effect transistor | Toshikazu Nishino, Ushio Kawabe, Tokuo Kure, Mutsuko Hatano, Haruhiro Hasegawa | 1994-05-31 |
| 5278421 | Pattern fabrication method using a charged particle beam and apparatus for realizing same | Haruo Yoda | 1994-01-11 |