Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350485 | High-resolution lithography and semiconductor device manufacturing method | Hiroshi Shiraishi, Takashi Soga, Fumio Murai, Nobuaki Hayashi | 1994-09-27 |
| 5324550 | Pattern forming method | Hidenori Yamaguchi, Fumio Murai, Norio Hasegawa, Hiroshi Shiraishi | 1994-06-28 |