Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635391 | Method for fabricating reticles for EUV lithography without the use of a patterned absorber | Donald W. Sweeney, Paul B. Mirkarimi | 2003-10-21 |
| 6319635 | Mitigation of substrate defects in reticles using multilayer buffer layers | Paul B. Mirkarimi, Sasa Bajt | 2001-11-20 |
| 6002553 | Giant magnetoresistive sensor | Stephen P. Vernon, Natale M. Ceglio, Andrew M. Hawryluk | 1999-12-14 |
| 5958605 | Passivating overcoat bilayer for multilayer reflective coatings for extreme ultraviolet lithography | Claude Montcalm, Stephen P. Vernon | 1999-09-28 |
| 5698113 | Recovery of Mo/Si multilayer coated optical substrates | Sherry Baker, Stephen P. Vernon | 1997-12-16 |