Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5051117 | Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds | Helene Prigge, Harald Hoffman, Hans-Peter Bortner | 1991-09-24 |
| 4971654 | Process and apparatus for etching semiconductor surfaces | Anton Schnegg, Gerhard Brehm, Helene Prigge, Fritz Ketterl | 1990-11-20 |
| 4892568 | Process for removing n-type impurities from liquid or gaseous substances produced in the gas-phase deposition of silicon | Helene Prigge, Michael Schwab, Hans-Peter Bortner, Andreas Englmuller | 1990-01-09 |
| 4539221 | Process for the chemical vapor deposition of oxidic particles | Herbert Jacob, Anton Schnegg | 1985-09-03 |