Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4968381 | Method of haze-free polishing for semiconductor wafers | Helene Prigge, Anton Schnegg, Gerhard Brehm | 1990-11-06 |
| 4692223 | Process for polishing silicon wafers | Ingolf Lampert | 1987-09-08 |
| 4539221 | Process for the chemical vapor deposition of oxidic particles | Robert Rurlander, Anton Schnegg | 1985-09-03 |