Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5167667 | Process for treating polishing cloths used for semiconductor wafers | Josef Lang | 1992-12-01 |
| 5164323 | Process for the surface treatment of semiconductor slices | Gerhard Brehm, Reinhold Wahlich | 1992-11-17 |
| 5110428 | Process and apparatus for double-sided chemomechanical polishing of semiconductor wafers and semiconductor wafers obtainable thereby | Josef Lang | 1992-05-05 |
| 5051117 | Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds | Robert Rurlander, Harald Hoffman, Hans-Peter Bortner | 1991-09-24 |
| 4973563 | Process for preserving the surface of silicon wafers | Anton Schnegg, Gerhard Brehm | 1990-11-27 |
| 4971654 | Process and apparatus for etching semiconductor surfaces | Anton Schnegg, Gerhard Brehm, Robert Rurlander, Fritz Ketterl | 1990-11-20 |
| 4968381 | Method of haze-free polishing for semiconductor wafers | Anton Schnegg, Gerhard Brehm, Herbert Jacob | 1990-11-06 |
| 4892568 | Process for removing n-type impurities from liquid or gaseous substances produced in the gas-phase deposition of silicon | Robert Rurlander, Michael Schwab, Hans-Peter Bortner, Andreas Englmuller | 1990-01-09 |