Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5051117 | Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds | Helene Prigge, Robert Rurlander, Harald Hoffman | 1991-09-24 |
| 4892568 | Process for removing n-type impurities from liquid or gaseous substances produced in the gas-phase deposition of silicon | Helene Prigge, Robert Rurlander, Michael Schwab, Andreas Englmuller | 1990-01-09 |