Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4892568 | Process for removing n-type impurities from liquid or gaseous substances produced in the gas-phase deposition of silicon | Helene Prigge, Robert Rurlander, Michael Schwab, Hans-Peter Bortner | 1990-01-09 |