Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5522957 | Method for leak detection in etching chambers | Calvin T. Gabriel, Vivek Jain, Dipankar Pramanik | 1996-06-04 |
| 5496774 | Method improving integrated circuit planarization during etchback | Dipankar Pramanik, Vivek Jain | 1996-03-05 |
| 5420796 | Method of inspecting planarity of wafer surface after etchback step in integrated circuit fabrication | Calvin T. Gabriel | 1995-05-30 |
| 5399533 | Method improving integrated circuit planarization during etchback | Dipankar Pramanik, Vivek Jain | 1995-03-21 |
| 5378318 | Planarization | Vivek Jain | 1995-01-03 |