Issued Patents All Time
Showing 76–84 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7476879 | Placement effects correction in raster pattern generator | Richard L. Lozes | 2009-01-13 |
| 7456414 | Beam re-registration system and method | Eugene Mirro, Thomas D. Lamson | 2008-11-25 |
| 7427765 | Electron beam column for writing shaped electron beams | William J. DeVore, Juergen Frosien, Xinrong Jiang, Richard L. Lozes, Henry Pearce-Percy +3 more | 2008-09-23 |
| 7417233 | Beam exposure correction system and method | Scott Stovall, Jimmy Iskandar, Ming Lun Yu | 2008-08-26 |
| 7397039 | Real-time compensation of mechanical position error in pattern generation or imaging applications | Bruce Baxter, Wenwei Qiao, Huei Kao | 2008-07-08 |
| 7244953 | Beam exposure writing strategy system and method | Richard L. Lozes | 2007-07-17 |
| 7235736 | Monolithic integration of cylindrical solar cells | Markus Beck | 2007-06-26 |
| 7227155 | Electrostatic deflection system with impedance matching for high positioning accuracy | William J. DeVore, Juergen Frosien, Eugene Mirro, Henry Pearce-Percy, Dieter Winkler | 2007-06-05 |
| 7105844 | Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems | — | 2006-09-12 |