Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6700643 | Device for exposure of a peripheral area of a film circuit board | Kazumoto Tochihara | 2004-03-02 |
| 6605814 | Apparatus for curing resist | Nozomu Tadika, Satoru Kuramochi | 2003-08-12 |
| 6570134 | Heat treatment device of the light irradiation type and heat treatment process of the irradiation type | Shinji Suzuki | 2003-05-27 |
| 6414279 | Heat treatment device of the light irradiation type | Shinji Suzuki | 2002-07-02 |
| 6365899 | Process for determination of blackening of a lamp | Tetsuji Arai, Shinji Suzuki | 2002-04-02 |
| 6052173 | Device for exposing the peripheral area of a wafer | Shinetsu Miura | 2000-04-18 |
| 5929976 | Process for exposing a peripheral area of a wafer and a device for executing the process | Isamu Shibuya, Takeshi Minore | 1999-07-27 |
| 5880816 | Process for exposing the peripheral area of a semiconductor wafer for removing unnecessary resist on the semiconductor wafer and a device for executing the process | Takeshi Minobe, Shinetsu Miura | 1999-03-09 |
| 4888271 | Method of treating photoresists | Shinji Suzuki, Tetsuji Arai, Kazuyoshi Ueki, Hiroko Suzuki | 1989-12-19 |
| 4882263 | Method of treating photoresists | Shinji Suzuki, Tetsuji Arai, Kazuyoshi Ueki, Hiroko Suzuki | 1989-11-21 |
| 4868095 | Method of treating photoresists | Shinji Suzuki, Kazuyoshi Ueki, Hiroko Suzuki | 1989-09-19 |
| 4841342 | Apparatus for treating photoresists | Shinji Suzuki, Tetsuji Arai, Kuniharu Ohno, Kazuyeshi Ueki, Kazuya Tanaka +2 more | 1989-06-20 |
| 4571486 | Heating method of semiconductor wafer | Tetsuji Arai | 1986-02-18 |
| 4567352 | Flashlight-radiant apparatus | Tetsuji Arai, Satoru Fukuda | 1986-01-28 |
| 4535228 | Heater assembly and a heat-treatment method of semiconductor wafer using the same | Tetsuji Arai, Hiroshi Shimizu, Satoru Fukuda | 1985-08-13 |
| 4525380 | Heating method of semiconductor wafer | Tetsuji Arai | 1985-06-25 |
| 4511788 | Light-radiant heating furnace | Tetsuji Arai | 1985-04-16 |
| 4493977 | Method for heating semiconductor wafers by a light-radiant heating furnace | Tetsuji Arai, Hiroshi Shimizu | 1985-01-15 |
| 4469529 | Method for heating semiconductor wafer by means of application of radiated light with supplemental circumferential heating | — | 1984-09-04 |
| 4468259 | Uniform wafer heating by controlling light source and circumferential heating of wafer | — | 1984-08-28 |