Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6052173 | Device for exposing the peripheral area of a wafer | Yoshiki Mimura | 2000-04-18 |
| 5923990 | Process for positioning a mask relative to a workpiece | — | 1999-07-13 |
| 5880816 | Process for exposing the peripheral area of a semiconductor wafer for removing unnecessary resist on the semiconductor wafer and a device for executing the process | Yoshiki Mimura, Takeshi Minobe | 1999-03-09 |
| 5168021 | Method for exposing predetermined area of peripheral part of wafer | Tetsuji Arai, Shinji Suzuki, Nobutaka Kajiura, Kazumoto Tochihara | 1992-12-01 |