Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6280060 | Cooling arrangement of a heating device of the light irradiation type | Shinji Suzuki | 2001-08-28 |
| 5880816 | Process for exposing the peripheral area of a semiconductor wafer for removing unnecessary resist on the semiconductor wafer and a device for executing the process | Yoshiki Mimura, Shinetsu Miura | 1999-03-09 |