Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6721037 | Device for exposure of a peripheral area of a wafer | Yoshinori Nagai | 2004-04-13 |
| 6700643 | Device for exposure of a peripheral area of a film circuit board | Yoshiki Mimura | 2004-03-02 |
| 5168021 | Method for exposing predetermined area of peripheral part of wafer | Tetsuji Arai, Shinji Suzuki, Nobutaka Kajiura, Shinetsu Miura | 1992-12-01 |