Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365899 | Process for determination of blackening of a lamp | Shinji Suzuki, Yoshiki Mimura | 2002-04-02 |
| 5932886 | Ultraviolet irradiation device | Koutaro Moroishi | 1999-08-03 |
| 5785793 | Process and device for bonding discs to one another | Shouei Ebisawa, Toshio Yokota | 1998-07-28 |
| 5677113 | Method for ashing a photoresist resin film on a semiconductor wafer and an asher | Shinji Suzuki, Kyohei Seki, Nobutoshi Ebashi | 1997-10-14 |
| 5168021 | Method for exposing predetermined area of peripheral part of wafer | Shinji Suzuki, Nobutaka Kajiura, Shinetsu Miura, Kazumoto Tochihara | 1992-12-01 |
| 4900938 | Method of treating photoresists | Shinji Suzuki, Hiroko Suzuki | 1990-02-13 |
| 4888271 | Method of treating photoresists | Shinji Suzuki, Kazuyoshi Ueki, Yoshiki Mimura, Hiroko Suzuki | 1989-12-19 |
| 4882263 | Method of treating photoresists | Shinji Suzuki, Kazuyoshi Ueki, Yoshiki Mimura, Hiroko Suzuki | 1989-11-21 |
| 4842992 | Method of treating photoresists | — | 1989-06-27 |
| 4840876 | Method of treating photoresists | — | 1989-06-20 |
| 4841342 | Apparatus for treating photoresists | Shinji Suzuki, Kuniharu Ohno, Kazuyeshi Ueki, Yoshiki Mimura, Kazuya Tanaka +2 more | 1989-06-20 |
| 4578143 | Method for forming a single crystal silicon layer | — | 1986-03-25 |
| 4571486 | Heating method of semiconductor wafer | Yoshiki Mimura | 1986-02-18 |
| 4567352 | Flashlight-radiant apparatus | Yoshiki Mimura, Satoru Fukuda | 1986-01-28 |
| 4550245 | Light-radiant furnace for heating semiconductor wafers | Hiroshi Shimizu | 1985-10-29 |
| 4543472 | Plane light source unit and radiant heating furnace including same | Tatsushi Igarashi | 1985-09-24 |
| 4540911 | Halogen lamp unit | Tatsushi Igarashi | 1985-09-10 |
| 4535228 | Heater assembly and a heat-treatment method of semiconductor wafer using the same | Yoshiki Mimura, Hiroshi Shimizu, Satoru Fukuda | 1985-08-13 |
| 4525380 | Heating method of semiconductor wafer | Yoshiki Mimura | 1985-06-25 |
| 4511788 | Light-radiant heating furnace | Yoshiki Mimura | 1985-04-16 |
| 4508960 | Light-radiant furnace | — | 1985-04-02 |
| 4504323 | Method for annealing semiconductors with a planar source composed of flash discharge lamps | Mitsuru Ikeuchi | 1985-03-12 |
| 4493977 | Method for heating semiconductor wafers by a light-radiant heating furnace | Yoshiki Mimura, Hiroshi Shimizu | 1985-01-15 |