Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6318538 | Device for treatment of a substrate | — | 2001-11-20 |
| 5929976 | Process for exposing a peripheral area of a wafer and a device for executing the process | Takeshi Minore, Yoshiki Mimura | 1999-07-27 |