Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6150259 | Method for forming a metal plug | Horng-Bor Lu | 2000-11-21 |
| 6140232 | Method for reducing silicide resistance | Yu-Tsai Lin | 2000-10-31 |
| 6120366 | Chemical-mechanical polishing pad | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Edward S. Yang, Fu-Yang Yu | 2000-09-19 |
| 6119294 | Cleaning system with automatically controlled brush pressure | Chien-Hsin Lai, Juen-Kuen Lin, Peng-Yih Peng | 2000-09-19 |
| 6077784 | Chemical-mechanical polishing method | Meng-Jin Tsai | 2000-06-20 |
| 6071806 | Method for preventing poisoned vias and trenches | Horng-Bor Lu | 2000-06-06 |
| 6062963 | Retainer ring design for polishing head of chemical-mechanical polishing machine | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Hao-Kuang Chiu | 2000-05-16 |
| 6057248 | Method of removing residual contaminants in an alignment mark after a CMP process | Horng-Bor Lu | 2000-05-02 |
| 6030892 | Method of preventing overpolishing in a chemical-mechanical polishing operation | Hao-Kuang Chiu, Horng-Bor Lu, Jenn-Tarng Lin | 2000-02-29 |
| 6013581 | Method for preventing poisoned vias and trenches | Horng-Bor Lu | 2000-01-11 |
| 6013559 | Method of forming trench isolation | Horng-Bor Lu | 2000-01-11 |
| 5883004 | Method of planarization using interlayer dielectric | Hao SHIU, Horng-Bor Lu, Jenn-Tarng Lin | 1999-03-16 |
| 5876508 | Method of cleaning slurry remnants after the completion of a chemical-mechanical polish process | Chien-Hsien Lai, Horng-Bor Lu, Jenn-Tarng Lin | 1999-03-02 |