| 7384806 |
Method for characterizing defects on semiconductor wafers |
Ken Kinsun Lee |
2008-06-10 |
| 7154605 |
Method for characterizing defects on semiconductor wafers |
Ken Kinsun Lee |
2006-12-26 |
| 6661515 |
Method for characterizing defects on semiconductor wafers |
Ken Kinsun Lee |
2003-12-09 |
| 6288782 |
Method for characterizing defects on semiconductor wafers |
Ken Kinsun Lee |
2001-09-11 |
| 6167148 |
Method and system for inspecting the surface of a wafer |
Louis D. Calitz, Kexing Cecilia Du, M. Kent Norton |
2000-12-26 |
| 6069690 |
Integrated laser imaging and spectral analysis system |
James Jianguo Xu, Ken Kinsun Lee |
2000-05-30 |
| 5963314 |
Laser imaging system for inspection and analysis of sub-micron particles |
Dale E. Crane, Hans J. Hansen, Christopher R. Fairley, Ken Kinsun Lee |
1999-10-05 |
| 5923430 |
Method for characterizing defects on semiconductor wafers |
Ken Kinsun Lee |
1999-07-13 |
| 5808735 |
Method for characterizing defects on semiconductor wafers |
Ken Kinsun Lee, Ke Han, Lakshman Srinivasan |
1998-09-15 |
| 5479252 |
Laser imaging system for inspection and analysis of sub-micron particles |
Dale E. Crane, Hans J. Hansen, Christopher R. Fairley, Ken Kinsun Lee |
1995-12-26 |