Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6761930 | Method of coating solution on substrate surface using a slit nozzle | Hiroyoshi Sago, Futoshi Shimai, Akira Uehara | 2004-07-13 |
| 6436472 | Method of applying a coating solution to a substrate surface using a rotary coater | Hiroyoshi Sago, Futoshi Shimai, Akira Uehara | 2002-08-20 |
| 6247579 | Substrate transfer apparatus and method of substrate transfer | Mikio Nishibata, Hirohito Sagoh | 2001-06-19 |
| 6090216 | Cleaning device and cleaning method for applicator nozzle | Kazunobu Yamaguchi, Junji Kutsuzawa, Hiroyoshi Sago | 2000-07-18 |
| 5785759 | Rotating cup type liquid supply device | Hiroyoshi Sago, Futoshi Shimai, Koichi Nagasawa | 1998-07-28 |
| 5660634 | Rotary-cup liquid supply device | Kazunobu Yamaguchi, Hiroyoshi Sago | 1997-08-26 |
| 5439519 | Solution applying apparatus | Hiroyoshi Sago, Hirotsugu Kumazawa, Futoshi Shimai, Hiroki Endo, Hideya Kobari | 1995-08-08 |
| 5415691 | Solution coating apparatus | Kazunobu Yamaguchi, Hiroyoshi Sago | 1995-05-16 |
| 5349978 | Cleaning device for cleaning planar workpiece | Hiroyoshi Sago, Katsuhiko Kudo, Hirotsugu Kumazawa | 1994-09-27 |