Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6247579 | Substrate transfer apparatus and method of substrate transfer | Shigemi Fujiyama, Mikio Nishibata | 2001-06-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6247579 | Substrate transfer apparatus and method of substrate transfer | Shigemi Fujiyama, Mikio Nishibata | 2001-06-19 |