Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7884062 | Cleaning liquid for lithography and cleaning method using same | Jun Koshiyama | 2011-02-08 |
| 6787412 | Dielectric element and method for fabricating the same | Akira Hashimoto, Yoshimi Sato, Atsushi Kawakami, Tetsuya Nakajima | 2004-09-07 |
| 6597027 | Dielectric element and method for fabricating the same | Akira Hashimoto, Yoshimi Sato, Atsushi Kawakami, Tetsuya Nakajima | 2003-07-22 |
| 6277441 | Method of forming coating film on a substrate | Hiroki Endo, Koji Ueda, Hiroyoshi Sago | 2001-08-21 |
| 6214104 | Coating solution for forming silica coating and method of forming silica coating | Hiroyuki Iida, Hiroki Endo, Yoshio Hagiwara, Toshimasa Nakayama | 2001-04-10 |
| 5614271 | Method for the formation of a silica-based coating film | Tatsuhiko Shibuya, Susumu Okano, Yoshio Hagiwara, Toshimasa Nakayama | 1997-03-25 |
| 5591262 | Rotary chemical treater having stationary cleaning fluid nozzle | Hiroyoshi Sago, Koji Ueda, Hidenori Miyamoto, Ryuzo Takatsuki | 1997-01-07 |
| 5439519 | Solution applying apparatus | Hiroyoshi Sago, Hirotsugu Kumazawa, Futoshi Shimai, Shigemi Fujiyama, Hiroki Endo | 1995-08-08 |