Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021968 | Susceptor and method for manufacturing silicon epitaxial wafer | Tsuyoshi Nishizawa, Hideki Hariya | 2011-09-20 |
| 7498520 | Semiconductor multilayer wiring board and method of forming the same | Tetsuya Osaka, Tokihiko Yokoshima, Isao Sato, Akira Hashimoto | 2009-03-03 |
| 7135064 | Silica-based coating film on substrate and coating solution therefor | Tatsuhiko Shibuya | 2006-11-14 |
| 6995096 | Method for forming multi-layer wiring structure | Hiroyuki Iida, Kazuto Ohbuchi, Atsushi Matsushita | 2006-02-07 |
| 6875262 | Silica-based coating film on substrate and coating solution therefor | Tatsuhiko Shibuya | 2005-04-05 |
| 6767839 | Method for forming multi-layer wiring structure | — | 2004-07-27 |
| 6723633 | Method for forming multi-layer wiring structure | Hiroyuki Iida, Kazuto Ohbuchi, Atsushi Matsushita | 2004-04-20 |
| 6515073 | Anti-reflective coating-forming composition | Yoshinori Sakamoto, Katsumi Omori | 2003-02-04 |
| 6503825 | Method for forming multi-layer wiring structure | Hiroyuki Iida, Kazuto Ohbuchi, Atsushi Matsushita | 2003-01-07 |
| 6338868 | Method for the formation of a siliceous coating film | Tatsuhiko Shibuya | 2002-01-15 |
| 6214104 | Coating solution for forming silica coating and method of forming silica coating | Hiroyuki Iida, Hiroki Endo, Hideya Kobari, Toshimasa Nakayama | 2001-04-10 |
| 6190788 | Method for the formation of a siliceous coating film | Tatsuhiko Shibuya | 2001-02-20 |
| 6074962 | Method for the formation of silica-based coating film | Yoshinori Sakamoto | 2000-06-13 |
| 5885654 | Polysilazane-based coating solution for interlayer insulation | Tatsuhiko Shibuya | 1999-03-23 |
| 5795378 | Coating solution for silica-based coating film and method for the preparation thereof | Yoshinori Sakamoto, Toshimasa Nakayama | 1998-08-18 |
| 5762697 | Coating solution for silica-based coating film and method for the preparation thereof | Yoshinori Sakamoto, Toshimasa Nakayama | 1998-06-09 |
| 5614251 | Method and liquid coating composition for the formation of silica-based coating film on substrate surface | Yoshinori Sakamoto, Hatsuyuki Tanaka, Toshimasa Nakayama | 1997-03-25 |
| 5614271 | Method for the formation of a silica-based coating film | Tatsuhiko Shibuya, Susumu Okano, Hideya Kobari, Toshimasa Nakayama | 1997-03-25 |
| 5496402 | Method and liquid coating composition for the formation of silica-based coating film on substrate surface | Yoshinori Sakamoto, Hatsuyuki Tanaka, Toshimasa Nakayama | 1996-03-05 |
| 5457153 | Liquid coating composition | Isao Satoh, Hatsuyuki Tanaka, Toshimasa Nakayama | 1995-10-10 |