Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119193 | Method of manufacturing an epitaxial wafer comprising measuring a level difference between a front surface of a susceptor and an upper surface of a lift pin and adjusting a ratio of the heat source output | — | 2018-11-06 |
| 8021968 | Susceptor and method for manufacturing silicon epitaxial wafer | Tsuyoshi Nishizawa, Yoshio Hagiwara | 2011-09-20 |
| 5785764 | Susceptor for a gas phase growth apparatus | Yusho Hoshina | 1998-07-28 |