Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11233245 | Catalyst-layer forming apparatus | Hiroshi Okonogi, Yasuhiro Numao, Takayuki Hirao, Kimio Nishimura | 2022-01-25 |
| 9214372 | Substrate processing system, carrying device and coating device | Tsutomu Sahoda, Akihiko Sato | 2015-12-15 |
| 9010270 | Coating device including substrate carrying, application and removal units | Akihiko Sato, Tsutomu Sahoda, Kenji Maruyama | 2015-04-21 |
| 8919756 | Substrate processing system, carrying device, and coating device | Tsutomu Sahoda, Akihiko Sato | 2014-12-30 |
| 8807072 | Coating device | Tsutomu Sahoda, Akihiko Sato, Kenji Maruyama | 2014-08-19 |
| 8667924 | Coating device and nozzle managing method | Tsutomu Sahoda, Akihiko Sato | 2014-03-11 |
| 8617655 | Coating device and coating method | Tsutomu Sahoda, Akihiko Sato | 2013-12-31 |
| 8567342 | Coating device and coating method | Tsutomu Sahoda, Akihiko Sato | 2013-10-29 |
| 8387556 | Substrate processing system | Tsutomu Sahoda, Akihiko Sato | 2013-03-05 |
| 8189169 | Cooling apparatus and substrate treating apparatus | Shigeru Kawata | 2012-05-29 |
| 7975997 | Supporting pin | — | 2011-07-12 |
| 7943886 | Heat treatment apparatus | — | 2011-05-17 |
| 7717295 | Treatment solution supply apparatus | — | 2010-05-18 |
| 7591900 | Nozzle for supplying treatment liquid and substrate treating apparatus | — | 2009-09-22 |
| 7381270 | Slit nozzle and apparatus for supplying treatment liquid using slit nozzle | Shigeru Kawata | 2008-06-03 |
| 7158039 | Liquid leakage sensor and liquid leakage detecting system | Tatekazu Hayashida, Yohey Omata | 2007-01-02 |
| 6761930 | Method of coating solution on substrate surface using a slit nozzle | Hiroyoshi Sago, Shigemi Fujiyama, Akira Uehara | 2004-07-13 |
| 6436472 | Method of applying a coating solution to a substrate surface using a rotary coater | Hiroyoshi Sago, Shigemi Fujiyama, Akira Uehara | 2002-08-20 |
| 6423139 | Chemical liquid treatment apparatus | Koichi Nagasawa, Junji Kutsuzawa | 2002-07-23 |
| 6117623 | Remover solvent for partial removal of photoresist layer | Jun Koshiyama, Hidehito Fukushima | 2000-09-12 |
| 6015467 | Method of removing coating from edge of substrate | Koichi Nagasawa, Naomi Kawaguchi, Mitsuru Sato, Kouji Harada, Jun Koshiyama | 2000-01-18 |
| 5972426 | Method of coating substrate with coating nozzle | Junji Kutsuzawa, Hiroyoshi Sago, Hidenori Miyamoto | 1999-10-26 |
| 5785759 | Rotating cup type liquid supply device | Hiroyoshi Sago, Shigemi Fujiyama, Koichi Nagasawa | 1998-07-28 |
| 5769946 | Coating nozzle and coating device having coating nozzle | Junji Kutsuzawa, Hiroyoshi Sago, Hidenori Miyamoto | 1998-06-23 |
| 5688411 | Method of and apparatus for removing coating from edge of substrate | Junji Kutsuzawa, Yoshihito KAI, Hidenori Miyamoto | 1997-11-18 |