Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236283 | Chamber apparatus and heating method | Yoshiaki Masu, Takashi Maruyama | 2016-01-12 |
| 9214372 | Substrate processing system, carrying device and coating device | Futoshi Shimai, Akihiko Sato | 2015-12-15 |
| 9027504 | Heating apparatus, coating apparatus and heating method | Hidenori Miyamoto | 2015-05-12 |
| 9010270 | Coating device including substrate carrying, application and removal units | Futoshi Shimai, Akihiko Sato, Kenji Maruyama | 2015-04-21 |
| 8919756 | Substrate processing system, carrying device, and coating device | Futoshi Shimai, Akihiko Sato | 2014-12-30 |
| 8807072 | Coating device | Futoshi Shimai, Akihiko Sato, Kenji Maruyama | 2014-08-19 |
| 8667924 | Coating device and nozzle managing method | Futoshi Shimai, Akihiko Sato | 2014-03-11 |
| 8617655 | Coating device and coating method | Futoshi Shimai, Akihiko Sato | 2013-12-31 |
| 8567342 | Coating device and coating method | Futoshi Shimai, Akihiko Sato | 2013-10-29 |
| 8387556 | Substrate processing system | Futoshi Shimai, Akihiko Sato | 2013-03-05 |
| 5879457 | Rotating cup coating device | Koji Ueda, Hiroki Endo, Hidenori Miyamoto | 1999-03-09 |
| 5706930 | Method of and apparatus for transferring circular object | Koji Ueda, Hidenori Miyamoto, Toru Arikawa | 1998-01-13 |
| 5332557 | Heating apparatus | Hideyuki Mizuki, Hidenori Miyamoto, Hisashi Hori, Hiroyoshi Sago | 1994-07-26 |