Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8189169 | Cooling apparatus and substrate treating apparatus | Futoshi Shimai | 2012-05-29 |
| 7381270 | Slit nozzle and apparatus for supplying treatment liquid using slit nozzle | Futoshi Shimai | 2008-06-03 |
| 5880308 | Process for preparing aromatic bisphosphates | Kiyoharu Hirao, Kazuo Noguchi | 1999-03-09 |
| 5616768 | Process for purifying phosphoric esters | Kazuo Noguchi, Kenji Ako, Shin Nakamura | 1997-04-01 |