Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423139 | Chemical liquid treatment apparatus | Futoshi Shimai, Koichi Nagasawa | 2002-07-23 |
| 6090216 | Cleaning device and cleaning method for applicator nozzle | Kazunobu Yamaguchi, Shigemi Fujiyama, Hiroyoshi Sago | 2000-07-18 |
| 5972426 | Method of coating substrate with coating nozzle | Hiroyoshi Sago, Futoshi Shimai, Hidenori Miyamoto | 1999-10-26 |
| 5769946 | Coating nozzle and coating device having coating nozzle | Hiroyoshi Sago, Futoshi Shimai, Hidenori Miyamoto | 1998-06-23 |
| 5688411 | Method of and apparatus for removing coating from edge of substrate | Yoshihito KAI, Hidenori Miyamoto, Futoshi Shimai | 1997-11-18 |