Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5571324 | Rotary-cup coating apparatus | Hiroyoshi Sago, Hideyuki Mizuki | 1996-11-05 |
| 5349978 | Cleaning device for cleaning planar workpiece | Hiroyoshi Sago, Shigemi Fujiyama, Hirotsugu Kumazawa | 1994-09-27 |
| 5238713 | Spin-on method and apparatus for applying coating material to a substrate, including an air flow developing and guiding step/means | Hiroyoshi Sago, Hideyuki Mizuki, Muneo Nakayama | 1993-08-24 |
| 5116250 | Method and apparatus for applying a coating material to a substrate | Hiroyoshi Sago, Hideyuki Mizuki, Muneo Nakayama | 1992-05-26 |
| 4941426 | Thin-film coating apparatus | Hiroyoshi Sago, Hideyuki Mizuki, Muneo Nakayama | 1990-07-17 |