Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6067930 | Coaxial plasma processing apparatus | Akira Uehara, Atsushi Matsushita | 2000-05-30 |
| 5709519 | Plasma processing apparatus | Akira Uehara, Yoshitsugu Kawamura | 1998-01-20 |
| 5584647 | Object handling devices | Akira Uehara, Isamu Hijikata | 1996-12-17 |
| 5435880 | Plasma processing apparatus | Atsushi Matsushita, Shinichi Omori, Jun Kanamori | 1995-07-25 |
| 5364488 | Coaxial plasma processing apparatus | Akira Uehara, Atsushi Matsushita | 1994-11-15 |
| 5344536 | Method of and apparatus for processing a workpiece in plasma | Kazuto Obuchi, Satoshi Oya, Akira Uehara, Kazutoshi Fujisawa, Kazuhisa Takao | 1994-09-06 |
| 5083896 | Object handling device | Akira Uehara, Isamu Hijikata | 1992-01-28 |
| 4868096 | Surface treatment of silicone-based coating films | Muneo Nakayama, Akira Uehara, Akira Hashimoto, Toshihiro Nishimura, Isamu Hijikata +1 more | 1989-09-19 |
| 4749436 | Equipment for thermal stabilization process of photoresist pattern on semiconductor wafer | Isamu Hijikata, Akira Uehara, Muneo Nakayama | 1988-06-07 |
| 4277525 | Liquid compositions for forming silica coating films | Muneo Nakayama, Toshihiro Nishimura, Hisashi Nakane, Shozo Toda, Yoshio Hotta | 1981-07-07 |