Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770165 | Apparatus for plasma treatment | — | 2004-08-03 |
| 6758222 | Processing method for substrate | Kaoru Mizutani, Atsushi Matsushita | 2004-07-06 |
| 6656323 | Plasma processing apparatus | Kaoru Mizutani | 2003-12-02 |
| 5980684 | Processing apparatus for substrates | Hisashi Hori, Yoshitsugu Kawamura | 1999-11-09 |
| 5344536 | Method of and apparatus for processing a workpiece in plasma | Satoshi Oya, Mitsuaki Minato, Akira Uehara, Kazutoshi Fujisawa, Kazuhisa Takao | 1994-09-06 |