Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7815813 | End point detection method, end point detection device, and gas phase reaction processing apparatus equipped with end point detection device | Hiroshi Ikeda, Hideki Matsumura, Atsushi Masuda, Hironobu Umemoto | 2010-10-19 |
| 5344536 | Method of and apparatus for processing a workpiece in plasma | Kazuto Obuchi, Satoshi Oya, Mitsuaki Minato, Akira Uehara, Kazutoshi Fujisawa | 1994-09-06 |