Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7815813 | End point detection method, end point detection device, and gas phase reaction processing apparatus equipped with end point detection device | Kazuhisa Takao, Hiroshi Ikeda, Hideki Matsumura, Atsushi Masuda | 2010-10-19 |
| 7771701 | Hydrogen atom generation source in vacuum treatment apparatus, and hydrogen atom transportation method | Atsushi Masuda, Koji Yoneyama, Keiji Ishibashi, Manabu Ikemoto | 2010-08-10 |