Issued Patents All Time
Showing 51–75 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7321181 | Capacitive membrane ultrasonic transducers with reduced bulk wave generation and method | Arif Sanli Ergun, Goksen G. Yaralioglu | 2008-01-22 |
| 7305883 | Chemical micromachined microsensors | Calvin F. Quate, James K. Gimzewski | 2007-12-11 |
| 7274623 | Method and system for operating capacitive membrane ultrasonic transducers | Baris Bayram, Omer Oralkan | 2007-09-25 |
| 6958255 | Micromachined ultrasonic transducers and method of fabrication | Yongli Huang, Arif Sanli Ergun | 2005-10-25 |
| 6854338 | Fluidic device with integrated capacitive micromachined ultrasonic transducers | F. Levent Degertekin | 2005-02-15 |
| 6853041 | Micro-machined coupled capacitor devices | Fahrettin Levent Degertekin, Arif Sanli Ergun | 2005-02-08 |
| 6836020 | Electrical through wafer interconnects | Ching-Hsiang Cheng, Arif Sanli Ergun | 2004-12-28 |
| 6789426 | Microfluidic channels with integrated ultrasonic transducers for temperature measurement and method | Goksen G. Yaralioglu, Arif Sanli Ergun, Hemanth Jagannathan | 2004-09-14 |
| 6567572 | Optical displacement sensor | Fahrettin Levent Degertekin, Goksen G. Yaralioglu | 2003-05-20 |
| 6493288 | Wide frequency band micromachined capacitive microphone/hydrophone and method | Abdullah Atalar, Arif Sanli Ergun, F. Levent Degertekin | 2002-12-10 |
| 6474786 | Micromachined two-dimensional array droplet ejectors | Gokhan Percin | 2002-11-05 |
| 6445109 | Micromachined two dimensional array of piezoelectrically actuated flextensional transducers | Gokhan Percin | 2002-09-03 |
| 6430109 | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections | F. Levent Degertekin, Sam Calmes, Xuecheng Jin | 2002-08-06 |
| 6291927 | Micromachined two dimensional array of piezoelectrically actuated flextensional transducers | Gokhan Percin | 2001-09-18 |
| 6262946 | Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling | F. Levent Degertekin | 2001-07-17 |
| 6250161 | Ultrasonic photoresist process monitor and method | Susan Morton, F. Levent Degertekin | 2001-06-26 |
| 6112595 | Apparatus and method for characterizing semiconductor wafers during processing | Fred E. Stanke, Hung Pham, Talat Hasan | 2000-09-05 |
| 6019000 | In-situ measurement of deposition on reactor chamber members | Fred E. Stanke, Fahrettin Levent Degertekin, Hung Pham | 2000-02-01 |
| 6010316 | Acoustic micropump | Matthew I. Haller | 2000-01-04 |
| 6004832 | Method of fabricating an electrostatic ultrasonic transducer | Matthew I. Haller | 1999-12-21 |
| 5996415 | Apparatus and method for characterizing semiconductor wafers during processing | Fred E. Stanke, Hung Pham, Talat Hasan | 1999-12-07 |
| 5982709 | Acoustic transducers and method of microfabrication | Igal Ladabaum, Xuecheng Jin | 1999-11-09 |
| 5894452 | Microfabricated ultrasonic immersion transducer | Igal Ladabaum, Hyongsok Soh | 1999-04-13 |
| 5870351 | Broadband microfabriated ultrasonic transducer and method of fabrication | Igal Ladabaum | 1999-02-09 |
| 5828394 | Fluid drop ejector and method | Laurent Levin | 1998-10-27 |