Issued Patents All Time
Showing 76–80 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634177 | Apparatus for the real-time monitoring and control of a wafer temperature | Kun-Tzu Lin, Jung-Huang Peng, Chu-Song Shih | 2003-10-21 |
| 6597964 | Thermocoupled lift pin system for etching chamber | Yin-Cheng Ma, Sawyer Ho, Wen-Shyang Tsai, Chen-Feng Lin | 2003-07-22 |
| 6423175 | Apparatus and method for reducing particle contamination in an etcher | Cherng-Chang Tsuei, I Chang Wu | 2002-07-23 |
| 6117349 | Composite shadow ring equipped with a sacrificial inner ring | Cherng-Chang Tsuei, Shuan Yu Chang | 2000-09-12 |
| 6060721 | Apparatus for detecting correct positioning of a wafer cassette | — | 2000-05-09 |