Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7001098 | Lock structure and method for using thereof | Hsueh-Cheng Lin, Chin-Chen Chang, Chia-Fu Tsai, Zhen Shen | 2006-02-21 |
| 6716651 | Method and apparatus for identifying a wafer cassette | Martin Weng, Yu-Chih Huang, Robin Lien | 2004-04-06 |
| 6634177 | Apparatus for the real-time monitoring and control of a wafer temperature | Kun-Tzu Lin, Yu-Chih Huang, Chu-Song Shih | 2003-10-21 |