Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597964 | Thermocoupled lift pin system for etching chamber | Yu-Chih Huang, Yin-Cheng Ma, Sawyer Ho, Wen-Shyang Tsai | 2003-07-22 |
CL
Chen-Feng Lin
Overall (All Time): #3,518,301 of 4,157,543Top 85%
1
Patents All Time