Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6651704 | Stationary and pivotable trays for semiconductor wafer transfer | — | 2003-11-25 |
| 6597964 | Thermocoupled lift pin system for etching chamber | Yu-Chih Huang, Sawyer Ho, Wen-Shyang Tsai, Chen-Feng Lin | 2003-07-22 |