Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711374 | Mechanisms for forming oxide layer over exposed polysilicon during a chemical mechanical polishing (CMP) process | Che-Hao Tu, Chih-Yu Chang, Ying-Tsung Chen | 2017-07-18 |
| 9595450 | Composite structure for gate level inter-layer dielectric | Che-Hao Tu, Ying-Tsung Chen | 2017-03-14 |
| 9278423 | CMP slurry particle breakup | Kuo-Min Lin, Ying-Tsung Chen | 2016-03-08 |
| 6946397 | Chemical mechanical polishing process with reduced defects in a copper process | Chia-Che CHUNG, Chi-Wei Chung, Wen-Chih Chiou, Ying-Ho Chen, Syun-Ming Jang | 2005-09-20 |