Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777251 | Metrology for monitoring a rapid thermal annealing process | Ching-Shan Lu, Fu-Su Lee, Jih-Churng Twu, Yu-Chien Hsiao | 2004-08-17 |
| 6710889 | Method for improved dielectric layer metrology calibration | Pey-Yuan Lee, Chi-Shen Lo, Sian-Ren Horng, Han-Liang Tseng, Yi-Hung Chen | 2004-03-23 |
| 6647998 | Electrostatic charge-free solvent-type dryer for semiconductor wafers | Jih-Churng Twu, Ming-Dar Guo, Tsung-Chieh Tsai, Sheng-Hsiung Tseng, Yao-Pin Huang +3 more | 2003-11-18 |