Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7196006 | Manufacturing method for microelectronic device | Feng-Liang Lai, Cheng-Kuo Chu, Chi-Shen Lo | 2007-03-27 |
| 6862545 | Linewidth measurement tool calibration method employing linewidth standard | Hong-Ji Yang, Yi-Hung Chen, Chi-Shen Lo, Chen-Ning Fuh, Wen-Chung Lee | 2005-03-01 |
| 6710889 | Method for improved dielectric layer metrology calibration | Chi-Shen Lo, Sian-Ren Horng, Han-Liang Tseng, Wei-Ming You, Yi-Hung Chen | 2004-03-23 |