Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5923996 | Method to protect alignment mark in CMP process | Jui-Yu Chang, Syun-Ming Jang, Chen-Hua Yu | 1999-07-13 |
| 5919714 | Segmented box-in-box for improving back end overlay measurement | Jeng-Horng Chen | 1999-07-06 |
| 5858854 | Method for forming high contrast alignment marks | Chao-Chieh Tsai, Shun-Liang Hsu | 1999-01-12 |
| 5827782 | Multiple etch method for optimizing Inter-Metal Dielectric (IMD) spacer layer profile | — | 1998-10-27 |
| 5773196 | Prevention of anti-reflection coating damage | — | 1998-06-30 |
| 5709755 | Method for CMP cleaning improvement | So Wein Kuo, Chung-Long Chang | 1998-01-20 |
| 5661084 | Method for contact profile improvement | So Wein Kuo | 1997-08-26 |
| 5654234 | Method for forming a void-free tungsten-plug contact in the presence of a contact opening overhang | Chen-Hua Yu | 1997-08-05 |
| 5641382 | Method to remove residue of metal etch | Chih-Chien Hung, Yuan-Chang Huang | 1997-06-24 |