Issued Patents All Time
Showing 376–378 of 378 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7180572 | Immersion optical projection system | Jen-Chieh Shih, Burn Jeng Lin, Tsai-Sheng Gau, Chun-Kuang Chen, Chin-Hsiang Lin +1 more | 2007-02-20 |
| 7091502 | Apparatus and method for immersion lithography | Tsai-Sheng Gau, Chun-Kuang Chen, Burn Jeng Lin | 2006-08-15 |
| 6492073 | Removal of line end shortening in microlithography and mask set for removal | Burn Jeng Lin, Shih-Ying Chen, Shinn-Sheng Yu, Hua-Tai Lin, Anthony Yen +1 more | 2002-12-10 |