Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6004873 | Method for reducing the pattern sensitivity of ozone assisted chemical vapor deposited (CVD) silicon oxide insulator layers | Syun-Ming Jang | 1999-12-21 |
| 5804498 | Method of making an underlayer to reduce pattern sensitivity of ozone-TEOS | Syun-Ming Jang, Lung Chen | 1998-09-08 |
| 5723380 | Method of approach to improve metal lithography and via-plug integration | Chin-Kun Wang | 1998-03-03 |
| 5670016 | Method for cleaning substrate prior to tungsten deposition | Mao-Chieh Chen, Wen-Kuan Yeh, Pei-Jan Wang | 1997-09-23 |
| 5563104 | Reduction of pattern sensitivity in ozone-teos deposition via a two-step (low and high temperature) process | Syun-Ming Jang | 1996-10-08 |
| 5536681 | PE-OX/ozone-TEOS gap filling capability by selective N.sub.2 treatment on PE-OX | Syun-Ming Jang | 1996-07-16 |