Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594309 | Method and apparatus to characterize photolithography lens quality | Chih-Ming Ke | 2017-03-14 |
| 9097978 | Method and apparatus to characterize photolithography lens quality | Chih-Ming Ke | 2015-08-04 |
| 8755045 | Detecting method for forming semiconductor device | Jyuh-Fuh Lin, Te-Chih Huang, Jia-Rui Hu, Chih-Ming Ke | 2014-06-17 |
| 8592107 | Method and apparatus of providing overlay | Fu-Jye Liang, Li-Jui Chen, Chih-Ming Ke | 2013-11-26 |
| 8329360 | Method and apparatus of providing overlay | Fu-Jye Liang, Li-Jui Chen, Chih-Ming Ke | 2012-12-11 |
| 7350416 | Method for determining properties of a film, and apparatus for realizing the method | Yung-Yu Chen, Tsung-Tsong Wu, Pei-Zen Chang | 2008-04-01 |